IP Library › Assignment 047928/0112
Patent Assignment
Reel/Frame 047928/0112

Merger

Recorded: 2018-12-17 Pages: 5
Assignor
CARL ZEISS SMS GMBH
Executed: 2015-05-12
Assignee
CARL ZEISS SMT GMBH
RUDOLF-EBER-STRASSE 2, OBERKOCHEN, 73447, GERMANY
Covered Property (1)
Illumination Optical Unit for a Metrology System and Metrology System Comprising Such an Illumination Optical Unit
Application: 16/220,212 →
Publication: US 2019/0121145
Related Assignments (2)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest Dec 17, 2018
From: DOERING, DIRK
To: CARL ZEISS AG
Reel/Frame 047789/0799 →
Assignment of Assignor's Interest Dec 17, 2018
From: FRANK, THOMAS; SEITZ, HOLGER; LAENGLE, MARIO; MATEJKA, ULRICH
To: CARL ZEISS SMS GMBH
Reel/Frame 047789/0811 →