Patent Assignment
Reel/Frame 047945/0207
Assignment of Assignor's Interest
Recorded: 2019-01-09
Pages: 3
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO.8, LI-HSIN RD.6, SCIENCE-BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Cleaning Method and Apparatus