Patent Assignment
Reel/Frame 047961/0197
Assignment of Assignor's Interest
Recorded: 2019-01-10
Pages: 6
Assignors
TOMITA, MASAKI
Executed: 2018-11-26
TAKENAKA, HIROYUKI
Executed: 2018-11-26
YAHAGI, MITSUTOSHI
Executed: 2018-11-26
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Current Measuring Module Using Inspection Substrate and Inspection Substrate