Patent Assignment
Reel/Frame 047962/0455
Assignment of Assignor's Interest
Recorded: 2019-01-11
Pages: 4
Assignors
BATZER, RACHEL E.
Executed: 2019-01-09
GUI, ZHE
Executed: 2019-01-02
SAVITHRA, GALBOKKA HEWAGE LAYAN
Executed: 2018-12-28
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Integrated Showerhead with Improved Hole Pattern for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition