Patent Assignment
Reel/Frame 048046/0162
Assignment of Assignor's Interest
Recorded: 2019-01-17
Pages: 6
Assignors
RANJAN, ALOK
Executed: 2018-12-05
VENTZEK, PETER
Executed: 2018-12-05
OHATA, MITSUNORI
Executed: 2018-12-12
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Systems and Methods of Control for Plasma Processing