Patent Assignment
Reel/Frame 048062/0308
Assignment of Assignor's Interest
Recorded: 2019-01-18
Pages: 7
Assignors
SATO, AKIHIRO
Executed: 2018-12-03
TAKEDA, TSUYOSHI
Executed: 2018-12-03
HIROCHI, YUKITOMO
Executed: 2018-12-03
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device