Patent Assignment
Reel/Frame 048088/0813
Assignment of Assignor's Interest
Recorded: 2019-01-22
Pages: 6
Assignors
ASADA, YASUO
Executed: 2019-01-15
ORII, TAKEHIKO
Executed: 2019-01-15
TAKAHASHI, NOBUHIRO
Executed: 2019-01-15
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method