Patent Assignment
Reel/Frame 048154/0972
Assignment of Assignor's Interest
Recorded: 2019-01-28
Pages: 4
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Cleaning Apparatus and Substrate Processing Apparatus