Patent Assignment
Reel/Frame 048235/0693
Assignment of Assignor's Interest
Recorded: 2019-02-05
Pages: 5
Assignors
MATSUO, KEIICHIRO
Executed: 2019-01-08
OBATA, SUSUMU
Executed: 2019-01-08
SANO, MITSUO
Executed: 2019-01-08
HIGUCHI, KAZUHITO
Executed: 2019-01-08
SHIMOKAWA, KAZUO
Executed: 2019-01-08
Assignee
KABUSHIKI KAISHA TOSHIBA
1-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 105-0023, JAPAN
Covered Property
(1)
Etching Method, Method of Manufacturing Semiconductor Chip, and Method of Manufacturing Article