Patent Assignment
Reel/Frame 048308/0740
Assignment of Assignor's Interest
Recorded: 2019-02-12
Pages: 4
Assignee
ICT INTEGRATED CIRCUIT TESTING GESELLSCHAFT FÜR HALBLEITERPRÜFTECHNIK MBH
AMMERTHALSTR. 20, HEIMSTETTEN, D-85551, GERMANY
Covered Property
(1)
Charged Particle Beam Device, Interchangeable Multi-Aperture Arrangement for a Charged Particle Beam Device, and Method for Operating a Charged Particle Beam Device