Patent Assignment
Reel/Frame 048337/0938
Assignment of Assignor's Interest
Recorded: 2019-02-14
Pages: 3
Assignors
TSAI, TZUNG-YI
Executed: 2019-01-15
LEE, TSUNG-LIN
Executed: 2019-01-15
CHEN, YEN-MING
Executed: 2019-01-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Different Isolation Liners for Different Type FinFETs and Associated Isolation Feature Fabrication