Patent Assignment
Reel/Frame 048361/0294
Assignment of Assignor's Interest
Recorded: 2019-02-18
Pages: 3
Assignors
GUO, XIANGYU
Executed: 2019-02-15
ROYER, JAMES
Executed: 2019-02-18
PALLEM, VENKATESWARA R.
Executed: 2019-02-15
STAFFORD, NATHAN
Executed: 2019-02-15
Assignee
AMERICAN AIR LIQUIDE, INC.
46409 LANDING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Method to Improve Profile Control During Selective Etching of Silicon Nitride Spacers
Patent:
10,629,451 →
Application:
16/265,782 →