Patent Assignment
Reel/Frame 048407/0860
Assignment of Assignor's Interest
Recorded: 2019-02-22
Pages: 5
Assignor
TAKAHASHI, NOBUHIRO
Executed: 2019-01-30
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Method for Manufacturing Dram Capacitor