Patent Assignment
Reel/Frame 048498/0793
Assignment of Assignor's Interest
Recorded: 2019-03-05
Pages: 5
Assignors
VAN VOORST, PETER DANNY
Executed: 2017-09-25
LIN, NAN
Executed: 2017-09-26
ROOBOL, SANDER BAS
Executed: 2017-09-26
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2017-10-09
VAN DER POST, SIETSE THIJMEN
Executed: 2017-09-26
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Illumination Source for an Inspection Apparatus, Inspection Apparatus and Inspection Method