Patent Assignment
Reel/Frame 048546/0882
Assignment of Assignor's Interest
Recorded: 2019-03-08
Pages: 3
Assignors
KOFUJI, NAOYUKI
Executed: 2019-02-08
YOKOGAWA, KENETSU
Executed: 2019-02-07
IWASE, TAKU
Executed: 2019-02-12
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.