Patent Assignment
Reel/Frame 048548/0118
Assignment of Assignor's Interest
Recorded: 2019-03-08
Pages: 7
Assignors
WU, HENG
Executed: 2019-02-22
BAO, RUQIANG
Executed: 2019-02-26
WANG, JUNLI
Executed: 2019-02-24
YU, LAN
Executed: 2019-02-22
GUO, DECHAO
Executed: 2019-03-07
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Gate to Source/Drain Leakage Reduction in Nanosheet Transistors via Inner Spacer Optimization