Patent Assignment
Reel/Frame 048573/0676
Assignment of Assignor's Interest
Recorded: 2019-03-12
Pages: 8
Assignors
YAMAZAKI, SHUNPEI
Executed: 2019-02-28
SATO, MASATAKA
Executed: 2019-03-01
IDOJIRI, SATORU
Executed: 2019-03-01
TAKASE, NATSUKO
Executed: 2019-03-01
Assignee
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
398, HASE, ATSUGI-SHI, KANAGAWA-KEN, 243-0036, JAPAN
Covered Property
(1)
Cleaning Method of Glass Substrate, Manufacturing Method of Semiconductor Device, and Glass Substrate