Patent Assignment
Reel/Frame 048595/0192
Assignment of Assignor's Interest
Recorded: 2019-03-14
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Efficient Illumination Shaping for Scatterometry Overlay
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.