Patent Assignment
Reel/Frame 057454/0005
Change of Name
Recorded: 2021-09-02
Pages: 3
Assignor
KLA-TENCOR CORPORATION
Executed: 2019-06-19
Assignee
KLA CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Efficient Illumination Shaping for Scatterometry Overlay
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.