Patent Assignment
Reel/Frame 048645/0484
Assignment of Assignor's Interest
Recorded: 2019-03-20
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Cleaning Method and Processing Apparatus