Patent Assignment
Reel/Frame 048729/0038
Assignment of Assignor's Interest
Recorded: 2019-03-28
Pages: 4
Assignors
BAGGETT, JOHN F
Executed: 2019-03-28
REECE, RONALD N
Executed: 2019-03-28
KOPALIDIS, PETROS M
Executed: 2019-03-28
Assignee
AXCELIS TECHNOLOGIES INC
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
In-Situ Wafer Temperature Measurement and Control
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →