Patent Assignment
Reel/Frame 048755/0166
Assignment of Assignor's Interest
Recorded: 2019-04-01
Pages: 4
Assignor
KIM, HYUN-SU
Executed: 2019-03-29
Assignee
SEMES CO., LTD.
77, 4SANDAN 5-GIL, JIKSAN-EUP, SEOBUK-GU, CHEONAN-SI, CHUNGCHEONGNAM-DO, KOREA, REPUBLIC OF
Covered Property
(1)
Substrate Support Unit and Substrate Processing Apparatus Having the Same Including Reflective Member Configured to Reflect Light Toward Substrate