Patent Assignment
Reel/Frame 048866/0867
Assignment of Assignor's Interest
Recorded: 2019-04-12
Pages: 18
Assignor
ASML MASKTOOLS B.V.
Executed: 2013-12-20
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Source and Mask Optimization by Changing Intensity and Shape of the Illumination Source and Magnitude and Phase of Mask Diffraction Orders
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.