Patent Assignment
Reel/Frame 048878/0152
Assignment of Assignor's Interest
Recorded: 2019-04-12
Pages: 2
Assignor
SOCHA, ROBERT
Executed: 2004-08-18
Assignee
ASML MASKTOOLS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Source and Mask Optimization by Changing Intensity and Shape of the Illumination Source and Magnitude and Phase of Mask Diffraction Orders
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.