Patent Assignment
Reel/Frame 048869/0595
Assignment of Assignor's Interest
Recorded: 2019-04-12
Pages: 3
Assignor
SASAKI, YASUHARU
Executed: 2019-04-10
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Electrostatic Chuck, Substrate Processing Apparatus, and Substrate Holding Method