Patent Assignment
Reel/Frame 048885/0143
Assignment of Assignor's Interest
Recorded: 2019-04-15
Pages: 2
Assignor
THEIVANAYAGAM, MURALI GANTH
Executed: 2019-03-28
Assignee
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC.
451 BELLEVUE ROAD, NEWARK, DELAWARE, 19713
Covered Property
(1)
Chemical Mechanical Polishing Method for Cobalt with High Cobalt Removal Rates and Reduced Cobalt Corrosion