Chemical mechanical polishing method for cobalt with high cobalt removal rates and reduced cobalt corrosion
View Patent ↗A process for chemical mechanical polishing cobalt to planarize the surface and remove at least some of the cobalt from a substrate. The process includes providing a polishing composition, containing, as initial components: water; an oxidizing agent; colloidal silica abrasive particles; aspartic acid or salts thereof; a phosphonic acid having an alkyl group of greater than ten carbon atoms, wherein the phosphonic acid having the alky group of greater than ten carbon atoms is included in amounts sufficient to enable high cobalt removal rates of ≥2000 Å/min and substantial cobalt corrosion inhibition; and providing a chemical mechanical polishing pad, having a polishing surface; creating dynamic contact at an interface between the polishing pad and the substrate; and dispensing the polishing composition onto the polishing surface at or near the interface between the polishing pad and the substrate; wherein some of the cobalt is polished away and cobalt corrosion is substantially inhibited.
1. A method of chemical mechanical polishing cobalt, comprising:
providing a substrate comprising cobalt;
providing a chemical mechanical polishing composition, consisting of, as initial components:
water;
an oxidizing agent;
0.3 wt % to 1 wt % aspartic acid or salts thereof;
colloidal silica abrasive particles; and
a phosphonic acid or salt thereof having a formula:
wherein R is a linear alkyl group of twelve to eighteen carbon atoms, and wherein the phosphonic acid or salt thereof is in amounts of 0.0001 wt % to 0.001 wt %; and
optionally a biocide;
optionally, a pH adjusting agent selected from the group consisting of potassium hydroxide and nitric acid;
optionally, a surfactant; and
wherein a pH of the chemical mechanical polishing composition is from 7-11;
providing a chemical mechanical polishing pad, having a polishing surface;
creating dynamic contact at an interface between the chemical mechanical polishing pad and the substrate; and
dispensing the chemical mechanical polishing composition onto the polishing surface of the chemical mechanical polishing pad at or near the interface between the chemical mechanical polishing pad and the substrate to remove at least some of the cobalt.
2. The method of claim 1 , wherein the chemical mechanical polishing composition provided has a cobalt removal rate of ≥2000 Å/min with a platen speed of 93 revolutions per minute, a carrier speed of 87 revolutions per minute, a chemical mechanical polishing composition flow rate of 200 mL/min, a nominal down force of 13.8 kPa on a 200 mm polishing machine; and, wherein the chemical mechanical polishing pad comprises a polyurethane polishing layer containing polymeric hollow core microparticles and a polyurethane impregnated non-woven subpad.
3. The method of claim 1 , wherein the phosphonic acid of the chemical mechanical polishing composition provided is selected from the group consisting of dodecylphosphonic acid, tetradecylphosphonic acid and salts thereof.