Patent Assignment
Reel/Frame 048942/0016
Assignment of Assignor's Interest
Recorded: 2019-04-19
Pages: 5
Assignors
MISAKA, AKIO
Executed: 2019-03-21
CHUNG, NO-YOUNG
Executed: 2019-03-21
KIM, KI-SOO
Executed: 2019-03-21
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Methods of Manufacturing Semiconductor Devices, Method Sof Performing Extreme Ultraviolet Ray Exposure, and Methods of Performing Optical Proximity Correction