Patent Assignment
Reel/Frame 049031/0953
Assignment of Assignor's Interest
Recorded: 2019-04-30
Pages: 5
Assignors
TSAI, MING-HSUN
Executed: 2019-04-24
LI, PING-CHENG
Executed: 2019-04-24
CHEN, YEN-HSUN
Executed: 2019-04-24
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE BASED INDUSTRIAL PARK, HSINCHU, 300, TAIWAN
Covered Property
(1)
Method and Apparatus for Controlling Exhaust Pressure for an Extreme Ultraviolet Generation Chamber