Patent Assignment
Reel/Frame 049147/0825
Assignment of Assignor's Interest
Recorded: 2019-05-09
Pages: 2
Assignee
MI2-FACTORY GMBH
MORITZ-VON-ROHR-STR. 1A, 07745 JENA, GERMANY
Covered Property
(1)
Method and Device for Implanting Ions in Wafers