Patent Assignment
Reel/Frame 049172/0844
Assignment of Assignor's Interest
Recorded: 2019-05-14
Pages: 6
Assignors
SAKAMOTO, MASATO
Executed: 2019-04-17
ISHIZAKA, TADAHIRO
Executed: 2019-04-17
ITATANI, TAKESHI
Executed: 2019-04-17
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method and Etching Apparatus