Patent Assignment
Reel/Frame 049198/0006
Assignment of Assignor's Interest
Recorded: 2019-05-16
Pages: 3
Assignor
SHMAREV, YEVGENIY KONSTANTINOVICH
Executed: 2016-07-19
Assignee
ASML HOLDING N.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Device for Pupil Illumination in Overlay and Critical Dimension Sensors
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.