Patent Assignment
Reel/Frame 049198/0077
Assignment of Assignor's Interest
Recorded: 2019-05-16
Pages: 3
Assignor
EURLINGS, MARKUS FRANCISCUS ANTONIUS
Executed: 2016-07-15
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Method and Device for Pupil Illumination in Overlay and Critical Dimension Sensors
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.