Patent Assignment
Reel/Frame 049211/0735
Assignment of Assignor's Interest
Recorded: 2019-05-17
Pages: 7
Assignors
ORII, TAKEHIKO
Executed: 2019-04-09
ASADA, YASUO
Executed: 2019-04-09
LIN, JUN
Executed: 2019-04-09
HAGIWARA, AYANO
Executed: 2019-04-09
IRIE, SHINJI
Executed: 2019-04-09
TANOUCHI, KEIJI
Executed: 2019-04-09
WADA, KAKERU
Executed: 2019-04-09
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Etching Silicon-Containing Film, Computer-Readable Storage Medium, and Apparatus for Etching Silicon-Containing Film