Patent Assignment
Reel/Frame 049256/0488
Assignment of Assignor's Interest
Recorded: 2019-05-22
Pages: 6
Assignors
CHENG, KANGGUO
Executed: 2019-05-20
XU, PENG
Executed: 2019-05-21
LEE, CHOONGHYUN
Executed: 2019-05-20
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Formation of an Air Gap Spacer Using Sacrificial Spacer Layer