Patent Assignment
Reel/Frame 049267/0955
Assignment of Assignor's Interest
Recorded: 2019-05-23
Pages: 4
Assignors
LU, YEN-TIEN
Executed: 2019-05-21
SUN, XINGHUA
Executed: 2019-05-21
O'MEARA, DAVID L.
Executed: 2019-05-21
RALEY, ANGELIQUE
Executed: 2019-05-21
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Atomic Layer Deposition for Low-K Trench Protection During Etch