Patent Assignment
Reel/Frame 049389/0197
Change of Address
Recorded: 2019-06-06
Pages: 20
Assignor
TOKYO ELECTRON LIMITED
Executed: 2008-02-18
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method and Apparatus Fabrication Process of a Semiconductor Device
Related Assignments
(8)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 5, 2007
From: MIYOSHI, HIDENORI; ISHIKAWA, KENJI; TAKIGAWA, YUKIO; NAKATA, YOSHIHIRO
To: TOKYO ELECTRON LIMITED,; FUJITSU LIMITED; EBARA CORPORATION
Reel/Frame 019379/0660 →
Assignment of Assignor's Interest
Feb 13, 2009
From: FUJITSU LIMITED
To: FUJITSU MICROELECTRONICS LIMITED
Reel/Frame 022248/0521 →
Change of Name
Sep 16, 2010
From: FUJITSU MICROELECTRONICS LIMITED
To: FUJITSU SEMICONDUCTOR LIMITED
Reel/Frame 024990/0612 →
Change of Address
Dec 23, 2016
From: FUJITSU SEMICONDUCTOR LIMITED
To: FUJITSU SEMICONDUCTOR LIMITED
Reel/Frame 041188/0401 →
Assignment of Assignor's Interest
Jun 6, 2019
From: FUJITSU SEMICONDUCTOR LIMITED
To: TOKYO ELECTRON LIMITED; EBARA CORPORATION
Reel/Frame 049389/0502 →
Corrective Assignment to Correct the Property Number Previously Recorded at Reel: 049368 Frame: 0036. Assignor(S) Hereby Confirms the Assignment.
Jun 14, 2019
From: FUJITSU SEMICONDUCTOR LIMITED
To: TOKYO ELECTRON LIMITED; EBARA CORPORATION
Reel/Frame 049472/0938 →
Corrective Assignment to Correct the Property Number Previously Recorded at Reel: 049372 Frame: 0469. Assignor(S) Hereby Confirms the Assignment.
Jun 14, 2019
From: TOKYO ELECTRON LIMITED
To: TOKYO ELECTRON LIMITED
Reel/Frame 049472/0734 →
Nunc Pro Tunc Assignment
Apr 6, 2022
From: TOKYO ELECTRON LIMITED
To: EBARA CORPORATION
Reel/Frame 059617/0937 →