Patent Assignment
Reel/Frame 049472/0938
Corrective Assignment to Correct the Property Number Previously Recorded at Reel: 049368 Frame: 0036. Assignor(S) Hereby Confirms the Assignment.
Recorded: 2019-06-14
Pages: 6
Assignor
FUJITSU SEMICONDUCTOR LIMITED
Executed: 2019-03-29
Assignees
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-8481, JAPAN
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Substrate Processing Method and Apparatus Fabrication Process of a Semiconductor Device
Related Assignments
(8)
Other recorded transfers of the patent in this record — the chain of ownership.
Assignment of Assignor's Interest
Jun 5, 2007
From: MIYOSHI, HIDENORI; ISHIKAWA, KENJI; TAKIGAWA, YUKIO; NAKATA, YOSHIHIRO
To: TOKYO ELECTRON LIMITED,; FUJITSU LIMITED; EBARA CORPORATION
Reel/Frame 019379/0660 →
Assignment of Assignor's Interest
Feb 13, 2009
From: FUJITSU LIMITED
To: FUJITSU MICROELECTRONICS LIMITED
Reel/Frame 022248/0521 →
Change of Name
Sep 16, 2010
From: FUJITSU MICROELECTRONICS LIMITED
To: FUJITSU SEMICONDUCTOR LIMITED
Reel/Frame 024990/0612 →
Change of Address
Dec 23, 2016
From: FUJITSU SEMICONDUCTOR LIMITED
To: FUJITSU SEMICONDUCTOR LIMITED
Reel/Frame 041188/0401 →
Assignment of Assignor's Interest
Jun 6, 2019
From: FUJITSU SEMICONDUCTOR LIMITED
To: TOKYO ELECTRON LIMITED; EBARA CORPORATION
Reel/Frame 049389/0502 →
Change of Address
Jun 6, 2019
From: TOKYO ELECTRON LIMITED
To: TOKYO ELECTRON LIMITED
Reel/Frame 049389/0197 →
Corrective Assignment to Correct the Property Number Previously Recorded at Reel: 049372 Frame: 0469. Assignor(S) Hereby Confirms the Assignment.
Jun 14, 2019
From: TOKYO ELECTRON LIMITED
To: TOKYO ELECTRON LIMITED
Reel/Frame 049472/0734 →
Nunc Pro Tunc Assignment
Apr 6, 2022
From: TOKYO ELECTRON LIMITED
To: EBARA CORPORATION
Reel/Frame 059617/0937 →