Patent Assignment
Reel/Frame 049444/0992
Assignment of Assignor's Interest
Recorded: 2019-06-12
Pages: 5
Assignor
TOKUNAGA, YOICHI
Executed: 2019-06-03
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 1076325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium