Substrate processing apparatus, substrate processing method, and storage medium
There is provided a substrate processing apparatus including: a rotatable holding part configured to rotate a substrate while holding the substrate; a liquid supply part configured to supply a processing liquid to a peripheral edge portion of the substrate held by the rotatable holding part; a sensor configured to detect a temperature distribution at the peripheral edge portion; and a controller configured to execute an operation of detecting a boundary portion between a region of the peripheral edge portion to which the processing liquid adheres and a region of the peripheral edge portion to which the processing liquid does not adhere, based on the temperature distribution.
1. A substrate processing apparatus comprising:
a rotatable holder configured to rotate a substrate while holding the substrate;
a liquid supplier including a nozzle and configured to supply a processing liquid to a peripheral edge portion of the substrate held by the rotatable holder;
a sensor configured to detect a temperature distribution at the peripheral edge portion;
a controller configured to execute an operation of detecting a boundary portion between a region of the peripheral edge portion to which the processing liquid adheres and a region of the peripheral edge portion to which the processing liquid does not adhere, based on the temperature distribution; and
a position adjusting part configured to adjust a position where the processing liquid reaches the substrate,
wherein, after detecting the boundary portion, the controller is configured to further control the position adjusting part to adjust the position where the processing liquid reaches the substrate, based on a position of the boundary portion, while the liquid supplier supplies the processing liquid to the substrate.
2. The apparatus of claim 1 , further comprising:
a temperature adjusting part configured to increase a temperature difference between the processing liquid before adhering to the substrate and the substrate.
3. The apparatus of claim 2 , wherein the temperature adjusting part includes a heater configured to heat the substrate.
4. The apparatus of claim 1 , wherein the sensor is configured to detect a temperature distribution in a region located in a rotational direction of the substrate in a vicinity of a position where the processing liquid reaches the substrate.
5. A substrate processing method comprising:
holding and rotating a substrate;
supplying a processing liquid to a peripheral edge portion of the substrate under rotation;
detecting a temperature distribution at the peripheral edge portion;
detecting a boundary portion between a region of the peripheral edge portion to which the processing liquid adheres and a region of the peripheral edge portion to which the processing liquid does not adhere, based on the temperature distribution; and
after detecting the boundary portion, adjusting the position where the processing liquid reaches the substrate, based on a position of the boundary portion, while supplying the processing liquid to the substrate.
6. The method of claim 5 , further comprising:
increasing a temperature difference between the processing liquid before adhering to the substrate and the substrate.
7. The method of claim 6 , wherein the increasing the temperature difference between the processing liquid before adhering to the substrate and the substrate includes heating the substrate.
8. The method of claim 5 , wherein the detecting the temperature distribution at the peripheral edge portion includes detecting a temperature distribution in a region located in a rotational direction of the substrate in a vicinity of a position where the processing liquid reaches the substrate.
9. A computer-readable storage medium storing a program for causing an apparatus to execute the method of claim 5 .