Patent Assignment
Reel/Frame 049524/0152
Assignment of Assignor's Interest
Recorded: 2019-06-19
Pages: 6
Assignors
SHENG, SHURAN
Executed: 2019-02-11
ABE, SHINOBU
Executed: 2019-01-16
KUWAHARA, KEITA
Executed: 2019-02-07
SHIN, CHANG HEE
Executed: 2019-01-16
CHO, SU HO
Executed: 2019-06-17
Assignee
APPLIED MATERIALS, INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Reactor Design for Large-Area Vhf Plasma Processing with Improved Uniformity