Patent Assignment
Reel/Frame 049564/0914
Assignment of Assignor's Interest
Recorded: 2019-06-24
Pages: 2
Assignors
MIURA, MAKOTO
Executed: 2019-05-29
ISHII, YOHEI
Executed: 2019-05-28
SAKAI, SATOSHI
Executed: 2019-05-28
MAEDA, KENJI
Executed: 2019-05-28
Assignee
HITACHI HIGH-TECHNOLOGIES CORPORATION
24-14, NISHI SHIMBASHI 1-CHOME, MINATO-KU, TOKYO, 105-8717, JAPAN
Covered Property
(1)
Manufacturing Method of a Semiconductor Device and a Plasma Processing Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.