Patent Assignment
Reel/Frame 049612/0663
Assignment of Assignor's Interest
Recorded: 2019-06-27
Pages: 3
Assignors
CHENG, SU-TING
Executed: 2018-04-17
SOKOLOV, SERGEI
Executed: 2018-04-23
KOOLEN, ARMAND EUGENE ALBERT
Executed: 2018-04-17
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Metrology Method and Apparatus, Computer Program and Lithographic System