Patent Assignment
Reel/Frame 049659/0907
Assignment of Assignor's Interest
Recorded: 2019-07-03
Pages: 6
Assignors
SUZUKI, MASATO
Executed: 2019-05-13
KAWATO, SHUNJI
Executed: 2019-05-25
TAKAICHI, TETSUMASA
Executed: 2019-05-13
AKASHI, KAZUMICHI
Executed: 2019-05-13
Assignee
MERCK PATENT GMBH
FRANKFURTER STRASSE 250, DARMSTADT, 64293, GERMANY
Covered Property
(1)
Chemically Amplified Positive Type Photoresist Composition and Pattern Forming Method Using the Same