Patent Assignment
Reel/Frame 049800/0823
Assignment of Assignor's Interest
Recorded: 2019-07-19
Pages: 7
Assignors
SONG, SEUNG-YOON
Executed: 2019-06-24
PARK, CHAN-HOON
Executed: 2019-06-25
SUN, JONG-WOO
Executed: 2019-06-24
SUNG, JUNG-MO
Executed: 2019-06-24
HAN, JE-WOO
Executed: 2019-06-27
PARK, JIN-YOUNG
Executed: 2019-06-24
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129, SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Method, Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Apparatus