Patent Assignment
Reel/Frame 049802/0509
Assignment of Assignor's Interest
Recorded: 2019-07-19
Pages: 5
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Inspection Method and Substrate Inspection Apparatus