Patent Assignment
Reel/Frame 049843/0306
Assignment of Assignor's Interest
Recorded: 2019-07-24
Pages: 4
Assignors
UENO, TOMOHIRO
Executed: 2019-07-10
FUSE, KAZUHIKO
Executed: 2019-07-10
OMORI, MAO
Executed: 2019-07-10
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Heat Treatment Method and Heat Treatment Apparatus for Managing Dummy Wafer