Patent Assignment
Reel/Frame 049857/0569
Assignment of Assignor's Interest
Recorded: 2019-07-25
Pages: 3
Assignee
CENTRAL GLASS COMPANY, LIMITED
5253, OAZA OKIUBE, UBE-SHI, YAMAGUCHI, 755-0001, JAPAN
Covered Property
(1)
Dry Etching Method, Semiconductor Device Manufacturing Method, and Chamber Cleaning Method