Patent Assignment
Reel/Frame 049931/0623
Assignment of Assignor's Interest
Recorded: 2019-08-01
Pages: 4
Assignor
KOMORI, HAKU
Executed: 2019-06-12
Assignee
SUMCO CORPORATION
2-1, SHIBAURA 1-CHOME, MINATO-KU, TOKYO, 1058634, JAPAN
Covered Property
(1)
Epitaxial Growth Apparatus, Preheat Ring, and Method of Manufacturing Epitaxial Wafer Using These