Patent Assignment
Reel/Frame 049946/0547
Assignment of Assignor's Interest
Recorded: 2019-08-02
Pages: 6
Assignors
CLARK, ROBERT
Executed: 2019-04-15
TAPILY, KANDABARA
Executed: 2019-04-18
YU, KAI-HUNG
Executed: 2019-04-26
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Platform and Method of Operating for Integrated End-to-End Fully Self-Aligned Interconnect Process